The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2002
Filed:
Jun. 14, 2000
Applicant:
Inventors:
Stephen A. Neston, Orlando, FL (US);
Edward A. Rietman, Gotha, FL (US);
Assignee:
Lucent Technologies Inc., Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 1/00 ; B24B 4/900 ; B24B 5/100 ;
U.S. Cl.
CPC ...
B24B 1/00 ; B24B 4/900 ; B24B 5/100 ;
Abstract
The present invention provides a polishing apparatus comprising a carrier head, rigid members coupled to the carrier head at different points on the carrier head, and a controller coupled to each of the rigid members wherein the controller is configured to regulate forces applied against the carrier head through each of the rigid members.