The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2002
Filed:
Jul. 12, 2000
Marc Lagedamont, Annecy, FR;
Roland Bernard, Viuz-la-Chiesaz, FR;
Eric Chevalier, Annecy le Vieux, FR;
Alcatel, Paris, FR;
Abstract
In the invention, the gases present in a transfer chamber are pumped out by means of a primary pump that is driven by variable-speed drive means, that is connected in series with a turbomolecular secondary pump, and that is associated with gas monitoring means for monitoring one or more appropriate characteristic parameters of the pumped gases and for producing control signals acting on the drive means of the primary pump so as to adapt its pumping speed in order to avoid any condensation or solidification of the gases in the airlock or transfer chamber. It is thus possible to optimize the speed at which the pressure is lowered, and to reduce the pollution brought into the process chamber.