The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2002
Filed:
Feb. 11, 2000
Gary J. O'Brien, Gilbert, AZ (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
An acceleration sensor includes a substrate ( ), a proof mass ( ) over the substrate and having first and second attachment regions ( ), and an anchor structure ( ) coupled to the substrate. The sensor additionally includes a first suspension beam ( ) coupling the anchor structure to the first attachment region to suspend the proof mass over the substrate. The sensor further includes a second suspension beam ( ) coupling the anchor structure to the second attachment region to suspend the proof mass over the substrate. The first suspension beam has a first radius ( ) extending from the anchor structure to the first attachment region, and the second suspension beam has a second radius ( ) extending from the anchor structure to the second attachment region where the first radius is greater than the second radius.