The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2002
Filed:
Jul. 21, 2000
Applicant:
Inventors:
Roy E. Mallory, Bedford, MA (US);
Richard B. Carter, Marlborough, MA (US);
Assignee:
ADE Corporation, Westwood, MA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 2/726 ;
U.S. Cl.
CPC ...
G01R 2/726 ;
Abstract
A capacitive displacement sensor for measuring thin targets is presented. The plate of the measurement probe is designed to take into account the thin target shape and to provide accurate measurements of the thin target by reducing lateral movement sensitivity of the plate. The probe may also include a guard to reduce capacitive coupling of the plate with other structures which would affect the accuracy of the measurement.