The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2002
Filed:
Jun. 11, 1999
Applicant:
Inventors:
Seiichi Suzuki, Kawasaki, JP;
Kazuhiro Adachi, Kawasaki, JP;
Masaya Katayama, Kasugai, JP;
Noriyuki Suzuki, Kawasaki, JP;
Osamu Hideshima, Kawasaki, JP;
Kenichi Kawabata, Kawasaki, JP;
Masaya Ohtsuki, Kawasaki, JP;
Manabu Hayashi, Kawasaki, JP;
Junichi Yayanagi, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/144 ;
Abstract
In a semiconductor device having a fuse and an etching stopper film covering the fuse, an optical window exposing the etching stopper film and a contact hole exposing a conductor pattern are formed simultaneously. By applying a dry etching process further to the etching stopper film, an insulation film covering the fuse is exposed in the optical window.