The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2002
Filed:
Dec. 16, 1999
Graeme Huntley, Brentwood, CA (US);
Kate Wilson, Mountain View, CA (US);
The BOC Group, Inc., Murray Hill, NJ (US);
Abstract
An equipment skid for mounting ancillary equipment to support a semiconductor processing tool. The equipment skid comprises a plurality of equipment sections and a service section. The ancillary equipment is mounted within the equipment sections and the plurality of equipment and service sections are connected to one another in an in-line relationship to define a framework to allow external connections between the ancillary equipment and the semiconductor processing tool to pass through a region overlying the footprint of the service section. The equipment and service sections are preferably covered by an enclosure to contain leakage.