The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2002
Filed:
Sep. 15, 1999
Reinhard Linnemann, München, DE;
Martin Richter, München, DE;
Stefan Kluge, München, DE;
Peter Woias, München, DE;
Abstract
A method of producing a pump body having an inlet opening provided with an inlet valve ( ) and an outlet opening provided with an outlet valve ( ), said method comprising as a first step the step of structuring a respective first main surface of a first and of a second semiconductor disc ( ) for defining a valve flap structure ( ) of the inlet valve and a valve seat structure ( ) of the outlet valve in the first disc and a valve flap structure of the outlet valve and a valve seat structure of the inlet valve in the second disc. Following this, a valve flap well structure ( ) and a valve opening well structure ( ) are formed in a predetermined relationship with the valve flap structures and the valve seat structures in a respective second main surface of the first and of the second semiconductor disc. The first main surfaces of said first and second semiconductor discs are connected in such a way that the respective valve flap structure is arranged in a predetermined relationship with a respective valve seat structure. Finally, the respective second main surface of said first and of said second semiconductor disc is etched at least in the area of the valve flap well structure and of the valve opening well structure so as to expose the valve flaps and open the valve seats.