The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2002
Filed:
Feb. 11, 2000
Scott Crowder, Ossining, NY (US);
Dominic J. Schepis, Wappingers Falls, NY (US);
Melanie J. Sherony, Wappingers Falls, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A semiconductor device having a silicon-on-insulator (SOI) structure includes a field-effect transistor having amorphized source and drain regions formed by implanting silicon or germanium ions into a silicon layer formed over a buried insulator. The fully amorphized source and drain regions ultimately result in permanent crystalline defects that cause p-n junction leakage which allows charge in the body of the device to dissipate, thereby improving the overall efficiency and performance of the device. The source and drain regions are amorphized throughout their entire thickness to prevent single crystal re-crystallization from occurring during annealing and other subsequent processing steps that can degrade the quality of the p-n leakage junctions.