The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2002
Filed:
Mar. 18, 1999
Applicant:
Inventors:
Istvan McClain Boszormenyi, Hayward, CA (US);
Amber Sharma, Freemont, CA (US);
Rajiv Y. Ranjan, San Jose, CA (US);
Assignee:
Seagate Technology, Inc., Scotts Valley, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/04 ; B23K 2/604 ;
U.S. Cl.
CPC ...
B08B 7/04 ; B23K 2/604 ;
Abstract
Cleaning and inspecting a surface of the substrate comprises subjecting the surface to the output of a laser source for applying a cleaning energy to the surface and thereby remove contaminants on the surface. The laser source is used for inspecting the surface being cleaned and to measure the effect of the cleaning.