The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 21, 2002

Filed:

Aug. 31, 1999
Applicant:
Inventors:

John E. Field, Dorrington, CA (US);

Donald J. Elloway, Campbell, CA (US);

Chungdee Pong, Cupertino, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 2/147 ;
U.S. Cl.
CPC ...
G01N 2/147 ;
Abstract

Scattered or/and transmitted light is employed to determine characteristics, including dimensional information, of an object ( ) such as part ( ) of a flat-panel display. The dimensional information includes the average diameter of openings ( ) in the object, the average density of the openings, and the average thickness of a layer ( ) of the object. Light-diffraction patterns are produced to determine characteristics, such as abnormalities ( and ), of crossing lines ( and ) in such an object.


Find Patent Forward Citations

Field, John. (2002). Use of scattered and/or transmitted light in determining characteristics, including dimensional information, of object such as part of flat-panel display (U.S. Patent No. 6392750). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6392750

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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