The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2002
Filed:
Aug. 07, 1998
Masanobu Ito, Kawasaki, JP;
Norihiko Hara, Oyama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A processing apparatus processes an object, and includes at least first and second processing devices that are separated from each other by a partition. The apparatus includes a first housing that covers the first processing device, and a second housing that covers the second processing device. The second housing includes a first door device that is capable of opening the second housing. The apparatus also includes a controller having a CPU to control the first and second processing devices in accordance with a state of the first door device. The controller stops at least a part of the second processing device, and does not stop at least a part of the first processing device, when the first door device opens the second housing.