The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 21, 2002

Filed:

Aug. 10, 2000
Applicant:
Inventors:

Donald Jones Channin, Lawrenceville, NJ (US);

Francis Paul Pantuso, Robbinsville, NJ (US);

Robert Amantea, Manapalan, NJ (US);

Robert Raymond Michael, Maple Shade, NJ (US);

Assignee:

Sarnoff Corporation, Princeton, NJ (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/34 ;
U.S. Cl.
CPC ...
G01J 5/34 ;
Abstract

A MicroOptoElectroMechanical (MOEM) IR detector utilizes a novel combination of integrated MEMS and photonics to achieve high responsivity with low noise. Increasing incident radiant energy bends a bimaterial arm that moves a coupling waveguide into the evanescent field of a principal optical waveguide. This, in turn, modulates the light in the principal waveguide. This device has high detection sensitivity to incident radiation due to the combination of the length of the lever arm and the sensitivity of the evanescent field. The device exhibits low noise because photons are being modulated instead of electrons.


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