The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2002
Filed:
Sep. 02, 1999
Timothy G. Slater, San Francisco, CA (US);
Armand P. Neukermans, Palo Alto, CA (US);
XROS, Inc., Santa Clara, CA (US);
Abstract
A monolithically fabricated micromachined structure ( ) couples a reference frame ( ) to a dynamic plate ( ) or second frame for rotation of the plate ( ) or second frame with respect to the reference frame ( ). Performance of torsional oscillators or scanners ( ) benefits greatly by coupling the frame ( ) to the plate ( ) or second frame with torsional flexure hinges ( ) rather than torsion bars ( ). Appendages ( ), tethers ( ) or an improved drive circuit enhance electrostatic drive stability of torsional oscillators ( ). Wide and thin torsional flexure hinges ( ) and isotopically pure silicon enhance thermal conductivity between the plate ( ) and the frame ( ). Dampening material bridging slots ( ) adjacent to torsional flexure hinges ( ) drastically reduce the dynamic member's Q. A widened section ( ) of narrow torsional flexure hinges ( ) permit inclusion of a torsion sensor ( ). A dynamic member ( ) that includes an actuator portion ( ) performs light beam switching. Reflective coatings ( ), wire grid polarizers ( ), photo-detectors ( ) and Fresnel lenses ( ) enhance optical performance of the torsional scanners ( ).