The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2002
Filed:
Jun. 29, 2000
Chin-Yu Ku, Hsinchu, TW;
Hsiang-Wei Tseng, Taichung, TW;
Vanguard International Semiconductor Corp., Hsinchu, TW;
Abstract
A method of manufacturing semiconductor devices. An alignment mark is formed in any one of the dies in a substrate. A waiting-for-patterning layer is formed over the dies. A negative photoresist layer is formed over the waiting-for-patterning layer. A first exposure is carried out so that a plurality of first exposed regions is formed in all the dies of the chip. A second exposure is carried out to form a second exposed region. The second exposed region overlaps with the first exposed region and the unexposed region above the alignment mark and the overlapping region covers the alignment mark region. A photoresist development is conducted to remove the negative photoresist in the unexposed regions. Using the negative photoresist as a mask, a portion of the waiting-for-patterning layer is removed to form a pattern on the waiting-for-patterning layer. The negative photoresist layer is removed.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile