The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 21, 2002

Filed:

May. 15, 2000
Applicant:
Inventors:

Jung-Chieh Su, Hsin-Chu, TW;

Chien-Kang Kao, Hsin-Tien, TW;

I-Nan Lin, Hsin-Chu, TW;

Chuen-Horng Tsai, Hsin-Chu, TW;

Cheng-Chung Chi, Hsin-Chu, TW;

Yung-Sheng Liu, Hsin-Chu, TW;

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/16 ; G03F 7/38 ; G03F 7/40 ; G02B 6/10 ; G02B 6/00 ;
U.S. Cl.
CPC ...
G03F 7/16 ; G03F 7/38 ; G03F 7/40 ; G02B 6/10 ; G02B 6/00 ;
Abstract

This invention discloses a manufacturing process for preparing sol-gel optical waveguides comprising the steps of solution preparation, an optical waveguide photoresist module process, and optical waveguide molding and sintering. The solution is prepared by mixing water and alcohol to form an alcoholic solution with a properly adjusted pH value followed by mingling with tetraethylorthosilicate (TEOS) at room temperature. The optical waveguide photoresist module process comprises the steps of soft baking, exposure, development, washing by deionized water, drying by a nitrogen gun, and hard baking. The optical waveguide molding and sintering comprises the steps of spinning, sintering, and photoresist module removal.


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