The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2002
Filed:
Feb. 11, 2000
Peter Mahler, Hainburg, DE;
Michael Scherer, Rodenbach, DE;
Unaxis Trading AG, Trubbach, CH;
Abstract
A workpiece holding device for a vacuum unit has coolable or heatable transfer plates ( ) displaceable independently of one another in a baseplate ( ) and each comprising a heat transfer surface ( ) which is surrounded by an O-ring ( ), is connected to a pipe ( ) and, with a workpiece ( ) which is pressed against the O-ring ( ) by a holder ( ), encloses a gap ( ). The holder ( ) can be locked to the baseplate ( ). After lowering of the holder ( ) into a closed position and load-free locking to the baseplate ( ), the heat transfer plates ( ) are pneumatically raised until in each case a stop ( ) becomes effective between said heat transfer plates and the holder ( ) and determines the width of the gap ( ). The gap ( ) is then filled via the pipe ( ) with a heat transfer medium, e.g. helium. After processing of the workpiece ( ), the heat transfer plates ( ) are lowered and the holder ( ) is released again in a loadfree manner.