The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2002
Filed:
Apr. 06, 2000
Applicant:
Inventors:
Leroy Grant, Austin, TX (US);
Gunter Hraschan, Dresden, DE;
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B65G 1/133 ;
U.S. Cl.
CPC ...
B65G 1/133 ;
Abstract
In a single cleanroom ( ) for first ( ) and second ( ) wafer processing machines, an exhaust device ( ) surrounds the second machine ( ) that temporarily produces exhaust gas ( ) which is detrimental to the processes in the first machine ( ). Additionally to a first directed air flow ( ) available in the cleanroom ( ), the exhaust device ( ) generates—in the proximity of gas leakage openings of the second machine ( )—a second air flow ( ) that prevents the exhaust gas ( ) from further being moved by the first air flow ( ) to the first machine ( ).