The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2002
Filed:
Mar. 30, 2000
Applicant:
Inventors:
Ing-Feng Hu, Midland, MI (US);
Jeffrey R. Dykhouse, Murrieta, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/600 ; C23C 1/400 ; H05H 1/00 ;
U.S. Cl.
CPC ...
C23C 1/600 ; C23C 1/400 ; H05H 1/00 ;
Abstract
An electrode is provided which can improve the efficiency and quality of plasma-generated coatings in a plasma enhanced chemical vapor deposition coating device. The electrode comprises dual shower head faces containing in the preferred mode a plurality of magnets which are aligned so that the poles of the magnets face in the same direction to thus generate two magnetron faces for each set of magnets.