The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2002
Filed:
Aug. 17, 2000
Applicant:
Inventors:
Martin Peiter, Dresden, DE;
Clinton Haris, Dresden, DE;
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/30 ;
U.S. Cl.
CPC ...
G01B 7/30 ;
Abstract
In a transportation system ( ) for wafers, a wafer container ( ) has kinematic coupling grooves, and a support surface ( ) has kinematic coupling pins. Grooves and pins are at least partially electrically conductive to allow monitoring the correct position of the container by measuring electrical resistance, as well as to allow signal exchange to and from the container ( ). The kinematic coupling pins have first and second surface areas that are electrically isolated.