The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2002
Filed:
Mar. 23, 2000
Kaori Misawa, Gifu, JP;
Kazunori Fujita, Gifu, JP;
Sanyo Electric Co., Ltd., Osaka, JP;
Abstract
There is disclosed a semiconductor device in which trenches are formed at predetermined intervals on a silicon substrate. In each trench, a first silicon oxide film is formed with the upper region of the first silicon oxide film protruding from a main substrate surface. A second silicon oxide film is formed from a boundary of the upper region in the first silicon oxide film and substrate over to the substrate surface. The height of the second silicon oxide film from the substrate surface is smaller than that of the upper region from the substrate surface. An active region is defined/formed on the substrate surface by an isolating film formed of the first and second silicon oxide films. A gate oxide film is formed on an active region surface, and a gate electrode is formed on the gate oxide film and extended from the active region over to the upper part of the isolating film.