The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2002
Filed:
May. 05, 2000
Kun Lian, Baton Rouge, LA (US);
Zhong-Geng Ling, Baton Rouge, LA (US);
Board of Supervisors of Louisiana State University and Agricultural and Mechanical College, Baton Rouge, LA (US);
Abstract
A method to decrease the surface roughness of exposed PMMA surfaces has been discovered. PMMA surface roughness was decreased by a post-exposure heat treatment of less than 70° C. The optimum post-exposure heat treatment to produce a PMMA microstructures with a smooth surface was found to be about 60° C. for about 30 min. The structural features of post-exposure heat-treated PMMA patterns were not statistically different from otherwise identical features of untreated PMMA patterns. This method produces a smoother PMMA structure that may then optionally be glued on a substrate or that may be assembled with other PMMA structures into a three-dimensional or multilayer microstructure.