The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2002
Filed:
Nov. 24, 1999
Robert M. Porter, Jr., Fort Collins, CO (US);
Anatoli V. Ledenev, Fort Collins, CO (US);
Gennady G. Gurov, Fort Collins, CO (US);
Advanced Energy Industries, Inc., Fort Collins, CO (US);
Abstract
A high power radio frequency power method of amplifications described in which a variety of amplifiers ( & ) may be used to reduce the stress any one amplifier experiences. The power leads ( & ) may be arranged in a series to power each amplifier at potentials which are lower than the total potential. Outputs ( ) may then be connected in a parallel fashion to combine the power output by the system. A variety of unique stabilization, drive, division, combination, and supply configurations are presented as well as the possibility of utilization and adaptation of the designs for a plasma processing system. An aspect of tiered combining is included such as may be especially appropriate for larger numbers of devices which may include switchmode amplifiers and the like.