The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2002
Filed:
Jun. 20, 2000
Jae Young Kim, Kyoungki-do, KR;
Tae Jin Kang, Kyoungki-do, KR;
Hyundai Electronics Industries Co., Ltd., Kyoungki-do, KR;
Abstract
A method for forming an inner cylinder type storage electrode of a semiconductor memory device, comprising the steps of: forming a first insulating layer on a substrate; etching the first insulating layer to form a contact hole, thereby exposing a portion of the substrate; forming a conductive film for a storage electrode over the first insulating layer including the contact hole; forming a photosensitive film in a portion of the contact hole over the conductive film; forming a second insulating layer to be completely filled in the contact hole over the photosensitive film; etching the second insulating layer and the conductive film to expose the first insulating layer, thereby forming the storage electrode; and removing the first and second insulating layers and the photosensitive film.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile