The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2002
Filed:
Dec. 27, 1999
Akiyoshi Watanabe, Kanagawa, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A silicon film is formed on a semiconductor substrate, and a silicon oxide film and a polycrystalline silicon film are formed thereon. Patterning is performed for the polycrystalline silicon film to form a capacitive upper electrode. Then, patterning is performed for the silicon oxide film to form a capacitive dielectric film below the capacitive upper electrode, the capacitive dielectric film having a shape larger than that of the capacitive upper electrode. Subsequently, an anti-reflection coating film (silicon nitride film which is silicon-rich) is formed on a full surface. Then, patterning is performed for the silicon film by means of photolithography to form a capacitive lower electrode and a gate electrode of a transistor.