The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2002
Filed:
Dec. 23, 1999
Yoshiaki Nakamura, Kanagawa-ken, JP;
Toshimitsu Omine, Tokyo, JP;
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
Provided is a coating film forming apparatus capable of shortening an operating time without considerably altering the design of the apparatus and changing the physical properties of a material such as a resist solvent. A spin coater for spreading a coating solution dropped onto a substrate to be coated over the substrate to be coated by the centrifugal pump action performed with the rotation of the substrate to be coated and for evaporating a solvent in the coating solution to form a coating film on the substrate to be coated, a tank for storing the coating solution, and a housing case for accommodating the substrate to be coated are provided in a casing P, and the casing P is provided in a cleaning room. A temperature in the casing P is set higher than a temperature in the clean room on the outside of the casing P by using temperature control devices and . Consequently, an operating time can be shortened.