The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2002
Filed:
May. 20, 2000
Carl Zeiss, Inc., Thornwood, NY (US);
Abstract
Embodiments of the present invention provide method and apparatus for measuring a wavefront of a beam of radiation. In particular, one embodiment of the present invention is an apparatus for measuring a wavefront of a beam of radiation at a first plane which includes: (a) relay optics adapted to relay the wavefront from the first plane to a second plane; (b) a moving boundary locus apparatus disposed between the first and second planes; (c) a two-dimensional photodetector array comprising—at least 4×4 photodetector elements disposed in the second plane, wherein each photodetector element produces a time varying signal in response to movement of a portion of the moving boundary locus apparatus; (d) a synchronizer adapted to synchronize each of the time varying signals with a position of the portion of the moving boundary locus apparatus; and (e) an analyzer, responsive to synchronized time varying signals output from the synchronizer, to measure the wavefront of the beam.