The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2002
Filed:
Dec. 22, 1998
Applicant:
Inventors:
Michael V. Bazylenko, Forestville, AU;
David Moss, Haberfield, AU;
Mark Gross, Seaforth, AU;
Pak Lim Chu, Bardwell Park, AU;
Assignee:
Unisearch Limited, Randwick, AU;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C03B 3/7018 ; C03B 3/701 ; G02B 6/10 ; H05H 1/24 ; G03C 5/16 ;
U.S. Cl.
CPC ...
C03B 3/7018 ; C03B 3/701 ; G02B 6/10 ; H05H 1/24 ; G03C 5/16 ;
Abstract
There is disclosed a method of constructing photosensitive waveguides on silicon wafers through the utilization of a Plasma Enhanced Vapor Deposition (PECVD) system. The deposition is utilized to vary the refractive index of resulting structures when they have been subject to Ultra Violet (UV) post processing.