The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2002
Filed:
May. 30, 2000
Hirofumi Nakayasu, Kawasaki, JP;
Youji Houki, Kawasaki, JP;
Yoshihiko Taira, Kawasaki, JP;
Tsutomu Nagatomi, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
It is an exemplified object of the present invention to provide a manufacturing device and method that can manufacture a high-performance exposure device in a short time. To achieve this object, the manufacturing method of the exposure device is configured to have its part detachable from its main body. This may allow, for instance, a holding member that holds the exposure device after a bonding step of the exposure device is finished while an adhesive is being cured, to be detached from the manufacturing device and to attach another holding member to the manufacturing device to continue the manufacturing process up to a bonding step, thereby reducing or eliminating a downtime of the device.