The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2002
Filed:
Dec. 29, 1999
Steven Mark Anlage, Laurel, MD (US);
Bokke Johannes Feenstra, Eindhoven, NL;
David Ethan Steinhauer, Laurel, MD (US);
University of Maryland, College Park, MD (US);
Abstract
A method of disentangling sample properties in a scanned sample requires a calibration sample in which two sample properties are variable. The calibration sample is scanned, and two measured variables are recorded during the scan. The two sample properties are measured quantitatively by an independent means. Using the data from the calibration sample, conversion functions are mathematically determined, in order to convert the two measured variables into the two sample properties. A sample, for which the two properties are unknown, is scanned, and the two measured variables are recorded. Using the conversion functions, the data from the scan is converted into the two sample properties of interest for the unknown sample. This method can be used with the first sample property being topography, so that effects due to the topography of the sample are eliminated from the computation of the second property of the unknown sample. This method can also be used with the probe in contact with the sample, so that topography is not one of the two sample properties.