The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2002
Filed:
May. 01, 2001
Applicant:
Inventors:
Toshihiro Tachikawa, Yokohama, JP;
Toshihiko Hanamachi, Kawasaki, JP;
Assignee:
NHK Spring Co., Ltd., Yokohama, JP;
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/68 ; H05B 3/08 ; C23C 1/600 ;
U.S. Cl.
CPC ...
H05B 3/68 ; H05B 3/08 ; C23C 1/600 ;
Abstract
A heater plate and a support structure are provided in a chamber. First terminals are arranged on the reverse side of the heater plate. The support structure is provided with second terminals in positions opposite to the first terminals, individually. The first and second terminals are coupled mechanically and electrically to one another by means of springy joint members of an electrically-conductive material. The joint members are removably attached to the first and second terminals. The heater plate can be separated from the support structure by disengaging the joint members from the first or second terminals.