The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2002
Filed:
Aug. 13, 1999
Applicant:
Inventors:
Tadahiro Ohmi, Miyagi, JP;
Yoshio Ishihara, Tokyo, JP;
Koh Matsumoto, Tokyo, JP;
Tetsuya Kimijima, Tokyo, JP;
Assignee:
Nippon Sanso Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 5/386 ; B01D 5/346 ; B01J 2/374 ;
U.S. Cl.
CPC ...
B01D 5/386 ; B01D 5/346 ; B01J 2/374 ;
Abstract
A process and an apparatus for treating an exhaust gas, in which a raw gas and high-boiling intermediate products contained in the exhaust gas let out from a CVD system employing a silicon-containing gas is brought into contact with a transition metal such as nickel or a silicide of such transition metals to decompose or convert them into stable halides, followed by detoxication treatment of the harmful components contained in the exhaust gas.