Capacitive pressure sensor or capacitive differential pressure sensor

Abstract

The electrodes of these pressure or differential pressure sensors are formed using a technique other than silk-screen printing or sputtering: The pressure sensor ( ) has a substrate ( ) and a first major surface ( ), a second major surface ( ) and a circumferential surface ( . A plate-shaped electrode ( ) of electrically conductive material is secured in a recess ( ) in the major surface ( ) in a high-pressure-resistant and high-vacuum-tight manner by a joining material ( ). A through connection ( ) is provided from the electrode ( ) through the substrate ( ) to the major surface ( ) or the circumferential surface ( ). A diaphragm ( ) of ceramic, glass, or single-crystal material is attached to the substrate ( ) outside the recess ( ) along a joint ( ) by a joining material ( ), and forms itself a further electrode or is covered, on a surface facing the electrode ( ), with a further electrode ( ) which is contacted through the joint ( ). Substrate and diaphragm consist of a ceramic, glass, or single-crystal material. Respective differential pressure sensors have either a common central diaphragm and two substrates or a common substrate and two diaphragms.