The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2002
Filed:
Apr. 09, 1999
Kazuo Takeuchi, Wako, JP;
Abstract
A particle formation diagnosing system monitors the condition of particle formation in each of reaction chambers of a semiconductor device fabricating line on the basis of data provided by a pressure measuring device , a temperature measuring device and a differential mobility analyzer combined with each reaction chamber The operation record recording unit of the computer system records data on the relation between the values of the operation parameters of each reaction chamber and the amount of particles formed in the reaction chamber. Then, the operating condition determining unit determines the optimum values for the operation parameters of the reaction chamber which will reduce the possibility of particle formation to the least possible extent on the basis of the data recorded by the operation record recording unit