The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2002
Filed:
May. 18, 1998
Applicant:
Inventor:
Balamurugan Subramanian, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 1/900 ;
U.S. Cl.
CPC ...
G06F 1/900 ;
Abstract
A method for determining the center ( ) of a silicon wafer ( ) on a wafer table ( ) is provided. The method includes measuring silicon wafer data with a sensor ( ). The silicon wafer data is received at a wafer center computing system ( ). The coordinates of the wafer center (Xw,Yw) in a wafer table Cartesian coordinate system ( ) are computed. The coordinates of the edge of the silicon wafer ( ) are then determined from the wafer center coordinates (Xw,Yw).
Subramanian, Balamurugan. (2002). System and method for determining the center of a wafer on a wafer table (U.S. Patent No. 6374149). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6374149
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