The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 16, 2002

Filed:

Jul. 29, 1999
Applicant:
Inventor:

James J. Jacob, Aptos, CA (US);

Assignee:

Actinix, Soquel, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/10 ;
U.S. Cl.
CPC ...
H01S 3/10 ;
Abstract

An optical system for producing ultraviolet radiation includes an optical source, an optical parametric oscillator (OPO), a frequency doubler, and a mixer. The optical source produces a first beam of radiation. The OPO receives a first portion of the first beam of radiation and produces a second beam of radiation therefrom. The frequency doubler receives a second portion of the first beam of radiation and produces the second harmonic thereof. The mixer mixes the second beam of radiation and the second harmonic of the first beam of radiation to produce an ultraviolet beam of radiation. In a preferred embodiment, the optical source includes a Nd:YAG laser which is frequency doubled to produce a first beam of radiation at a wavelength of approximately 532 nm; and the ultraviolet beam of radiation has a wavelength close to one of the excimer laser lines, typically either 193 nm or 157 nm.


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