The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 16, 2002

Filed:

May. 27, 1999
Applicant:
Inventors:

James D. Kafka, Mountain View, CA (US);

Bruce Craig, Los Gatos, CA (US);

Assignee:

Spectra Physics Lasers, Inc., Mountain View, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 2/100 ;
U.S. Cl.
CPC ...
G01N 2/100 ;
Abstract

An inspection apparatus includes a laser system. The laser system has a high reflector and an output coupler that define an oscillator cavity which produces an output beam. A gain medium and a mode locking device are positioned in the oscillator cavity. A diode pump source produces a pump beam that is incident on the gain medium. An output beam directing apparatus directs the output beam to the surface of the article. A surface flaw at the surface of the article produces scattered light from at least a portion of the output beam incident on the surface flaw. A detector is positioned to detect the scattered light.


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