The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2002
Filed:
Jun. 12, 2001
Applicant:
Inventors:
Assignee:
Hyundai Electronics Industries Co., Ltd., Kyungki-Do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/336 ;
U.S. Cl.
CPC ...
H01L 2/336 ;
Abstract
There is disclosed a method of manufacturing a floating gate in a flash memory device. In order to minimize the distance between floating gates, the method includes patterning a polysilicon film using a first PSG pattern in which a second PSG spacer is formed on and at the sidewall of the polysilicon film, and removing the first PSG film pattern and the second PSG film spacer using 50:1 HF or 9:1 BOE. Therefore, it can minimize the size of the device without damaging a polysilicon film and a field oxide.
Jung, Sung. (2002). Method for manufacturing a floating gate in a flash memory device (U.S. Patent No. 6372576). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6372576
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