The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2002
Filed:
Jan. 26, 2000
Applicant:
Inventors:
Toru Nasu, Kyoto, JP;
Koji Arita, Osaka, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/100 ; H01L 2/18242 ; H01L 2/120 ;
U.S. Cl.
CPC ...
H01L 2/100 ; H01L 2/18242 ; H01L 2/120 ;
Abstract
A coating of liquid precursor for forming a layered superlattice material is applied to a substrate, the substrate is dried and then pretreated using RTP at 450 ° C. for 5 minutes. Following the RTP, the substrate is annealed in an unreactive gas at a temperature not exceeding 800° C. then annealed in oxygen gas at a temperature not exceeding 800° C. for one hour to form a thin film of layered superlattice material.