The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2002
Filed:
Jan. 18, 2000
Paul Phillip Van Saarloos, Karrinyup, AU;
David Clyde MacPherson, Conifer, CO (US);
Q-Vis Limited, , AU;
Abstract
Method and apparatus are provided for measuring the surface profile of a sample. The method and apparatus provide light from a light source through a beam splitter to form two split beams, direct the split beams onto a sample surface and a reference surface respectively, reflect the split beams back through the beam splitter, and direct the split beams towards an imaging system. A surface profiling apparatus for measuring the surface profile of the sample is also provided. The apparatus includes a light source for generating a source beam, beam splitting means positioned in the path of the source beam for splitting the source beam into split beams, a reference surface, a sample surface allowing the split beams to traverse separate paths and return to the beam splitting means, reference surface positioning means for positioning the reference surface, and viewing means for imaging combined beams. An apparatus for calibrating a laser for the ablation of a material including the surface profiling apparatus is also provided.