The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2002
Filed:
May. 19, 1999
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
A method of forming an insulating film on a surface of a substrate includes the steps of heating the substrate in a processing chamber in an atmosphere containing water vapor maintained at 900° C. or higher to form a first insulating film on a surface of the substrate; and cooling down the substrate in the presence of water vapor to a temperature of 600° C. or less at a temperature decreasing rate of 15° C./sec or more so as to limit a thickness of a second insulating film formed at an interface between the first insulating film and the substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile