The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 09, 2002

Filed:

Dec. 29, 1999
Applicant:
Inventor:

Floyd E. Woodard, San Jose, CA (US);

Assignee:

Southwall Technologies, Inc., Palo Alto, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/434 ;
U.S. Cl.
CPC ...
C23C 1/434 ;
Abstract

A multi-layer antireflection coating is formed to include successive layers of a medium refractive index material, a high refractive index material, and a low refractive index material. The medium refractive index layer is hydrogenated in order to tailor the refractive index of the material to below 1.99 and to increase clarity in transmission. Preferably, the hydrogen atomic concentration is at least 7 percent, more preferably exceeds 9 percent, and most preferably exceeds 18 percent. The three layers combine to form a three-layer antireflection coating, but the hydrogenation may be used in antireflection coatings having a greater or lesser number of layers.


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