The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 02, 2002

Filed:

Aug. 04, 2000
Applicant:
Inventors:

Vladimir V. Talanov, Greenbelt, MD (US);

Steven Mark Anlage, Laurel, MD (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 2/700 ;
U.S. Cl.
CPC ...
G01R 2/700 ;
Abstract

An apparatus and method for accurately estimating the absolute value of surface resistances and penetration depths of metallic films and bulk samples. The apparatus carries out measurements using two nominally identical samples with flat sample surfaces which are brought together with a thin dielectric separation of variable thickness sandwiched between the samples in order to form a two-conductor parallel plate transmission line resonator which carries an electromagnetic wave. A liquid or gas of unknown dielectric properties fills the dielectric spacer. A resonant condition of the microwave signal is established and the resonant frequency and the quality factor Q are measured while the spacing between the sample plates is varied. The variation of the resonant frequency and Q with spacer thickness is then analyzed to yield absolute values of the sample surface resistance and penetration depth which are then further used for determination of absolute complex conductivity and surface impedance of the samples.


Find Patent Forward Citations

Loading…