The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2002
Filed:
Apr. 01, 1999
Patrick Anthony Begley, West Melbourne, FL (US);
Donald Frank Hemmenway, Melbourne, FL (US);
George Bajor, Melbourne, FL (US);
Anthony Lee Rivoli, Palm Bay, FL (US);
Jeanne Marie McNamara, Palm Bay, FL (US);
Michael Sean Carmody, Palm Bay, FL (US);
Dustin Alexander Woodbury, Indian Harbour Beach, FL (US);
Intersil Americas Inc., Irvine, CA (US);
Abstract
A bonded wafer has a device substrate with isolation trenches defining device regions Oxide dogbone structures are removed before filling trenches Voids in the trenches are spaced from the top of the trenches. The trenches are covered with an oxide layer and filled with polysilicon A LOCOS mask structure comprising a layer of CVD pad oxide and silicon nitride cover the trenches and the adjacent device substrate regions.