The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 02, 2002

Filed:

Jan. 22, 1999
Applicant:
Inventor:

Richard G. Smolen, Redwood City, CA (US);

Assignee:

Altera Corporation, San Jose, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/9788 ;
U.S. Cl.
CPC ...
H01L 2/9788 ;
Abstract

Disclosed is an EEPROM device, and a method of making such a device, which incorporates a self-aligned tunnel window having acceptably low gate capacitance at the tunnel oxide node, and which avoids the defects caused by field oxide induced stresses in the tunnel oxide. The EEPROM of the present invention includes a semiconductor substrate with a doped memory diffusion region. Overlying at least a portion of the memory diffusion is a tunnel oxide. Overlying at least a portion of the tunnel oxide is a floating gate structure including an extension. The tunnel window of the EEPROM of the present invention is defined within at least a portion of the tunnel oxide and having at least two edges defined by the floating gate extension, so that when a defined voltage is applied to the memory diffusion a tunnel current sufficient to change the state of the EEPROM flows between the memory diffusion and the floating gate structure.


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