The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2002
Filed:
Nov. 23, 1998
Applicant:
Inventors:
Assignee:
Mosel Vitelic Inc., Hsin-chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/100 ;
U.S. Cl.
CPC ...
H01L 2/100 ;
Abstract
The present invention provides a method for evenly immersing a wafer in a solution held in a solution chamber, which comprises the following steps: (1) placing at least one disk-shaped wafer inside a wafer holder which is used for vertically holding at least one wafer, (2) immersing the wafer holder into the solution vertically so that each wafer in the wafer holder can be vertically immersed into and react with the solution, (3) vertically rotating the wafer holder in the solution so as to invert each wafer in the wafer holder upside down, and (4) removing the wafer holder from the solution vertically after immersing the wafer in the solution for a predetermined period of time.