The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2002
Filed:
Apr. 19, 2000
Louis A. Ollivier, Palo Alto, CA (US);
Parker-Hannifin Corporation, Cleveland, OH (US);
Abstract
A fluid pressure regulator and method of operating the same particularly adapted for use in alternating flow and no flow modes as in the batchwise delivery of pressurized gases used in semiconductor manufacture. Such pressure regulator and method include a controlled differential pressure setting capability which provides for the application of a differential pressure setting force independently of a main pressure setting force. As a result, operation of the pressure regulator may be controlled to obviate pressure creep at the regulator outlet.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile