The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2002
Filed:
Oct. 23, 1998
Applicant:
Inventor:
Hiroaki Kakuma, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K 9/00 ;
U.S. Cl.
CPC ...
G06K 9/00 ;
Abstract
A measurement recipe includes measurement positions, which are expressed by coordinates in a wafer coordinate system defined on the wafer, and therefore the measurement recipe is applicable to a plurality of measurement devices. The coordinates of the respective measurement points in the wafer coordinate system are transformed into the coordinates in a stage coordinate system defined on a stage of a measuring device. This enables the respective measurement points on the wafer to be positioned by the coordinates in the stage coordinate system of the measuring device.