The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2002
Filed:
Feb. 02, 2000
Applicant:
Inventors:
Ji-Hai Xu, Gilbert, AZ (US);
Jenn-Hwa Huang, Gilbert, AZ (US);
John Michael Parsey, Jr., Phoenix, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/100 ;
U.S. Cl.
CPC ...
H01L 2/100 ;
Abstract
A micro electro-mechanical systems device having variable capacitance is controllable over the full dynamic range and not subject to the “snap effect” common in the prior art. The device features an electrostatic driver ( ) having a driver capacitor of fixed capacitance ( ) in series with a second driver capacitor of variable capacitance ( ). A MEMS variable capacitor ( ) is controlled by applying an actuation voltage potential to the electrostatic driver ( ). The electrostatic driver ( ) and MEMS variable capacitor ( ) are integrated in a single, monolithic device.