The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2002
Filed:
Apr. 26, 2000
Nobuhiko Yoshimura, Tokyo, JP;
Agilent Technologies, Inc., Loveland, CO (US);
Abstract
The data of a plurality of attributes of dies on a semiconductor wafer under a parametric test can be managed in a unified manner, and edited and displayed on a real-time basis with one tool. A semiconductor inspection apparatus has a memory for expanding and storing attribute data of dies as data of at least three values for selecting and specifying attributes of dies on a wafer from a plurality of attributes, and a display controller for allowing an operator to select any of the attributes of dies within one displayed image, and reflecting selected attributes immediately as die characteristics in the displayed image. A method of specifying attributes of dies on a wafer in such a semiconductor inspection apparatus is also disclosed.