The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2002
Filed:
Oct. 23, 1998
Applicant:
Inventors:
Ying H. So, Midland, MI (US);
Robert A. DeVries, Midland, MI (US);
Mitchell G. Dibbs, Midland, MI (US);
Robert L. McGee, Midland, MI (US);
Edward O. Shaffer, II, Midland, MI (US);
Michael J. Radler, Midland, MI (US);
Richard P. DeCaire, Midland, MI (US);
Assignee:
The Dow Chemical Company, Midland, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/038 ; G03F 7/039 ; G03F 7/021 ; G03F 7/023 ;
U.S. Cl.
CPC ...
G03F 7/038 ; G03F 7/039 ; G03F 7/021 ; G03F 7/023 ;
Abstract
The invention is a curable cyclobutarene based polymer comprising acid functional pendant groups. The cured polymer displays excellent qualities of toughness, adhesion, dielectric constant, and low stress. The preferred system is soluble in an aqueous base and can be used to generate patterned films with excellent resolution without the need to handle organic developer solvents.